SPEC Service Page

SPEC - Semiconductor Process Equipment Corp.

We specialize in integrated wet bench systems for any cleanroom environment.

Wet Benches - Silicon Wafers 2" to 300mm - Specialized Substrates 300mm x 300mm and up to 700mm diameter - Polysilicon Chunk Cleaning - Quartz Tubes - Crucible Filaments - Disk Drive Media and Heads - Bump Packaging - Electroless and Electroplating - UBM Under Bump Metallization - Wafer Processing - Etch - Solvent - Diffusion - Prediffusion - Oxide - Nitride - Resist - Photo resist - Biotech - DNA Arrays - Subdermal Sensors - PLC Programmable Logic Controllers - Quartz Tanks - Linear Transfer - Rotary Transfer - Chemical Dispense Systems - Waste Collection Systems - Water Heaters - Storage Cabinets - Carts

POST DELIVERY SUPPORT: Post delivery support for any SPEC Process System includes on-site assistance for all move-in placement functions.

ON-SITE TRAINING: SPEC provides on-site training for all operator, maintenance, and engineering personnel in coordination with the startup activities.

RESPONSE TIME: SPEC provides 24 hour per day, 7 days per week field service response via phone to any customer inquiry requiring response to a system down situation. After hours responses are delegated to the field service manager on-call via pager. Typical telephone response times to after hour inquiries are under thirty minutes.

AFTER HOURS: After hour field service contacts are handled through SPEC's after hour phone system via a pager response to the customer by the field service management staff. A typical unexpected response time to a customer site in the east is less than 24 hours.