SPEC Products Page

SPEC - Semiconductor Process Equipment Corp.

We specialize in integrated wet bench systems for any cleanroom environment.

Wet Benches - Silicon Wafers 2" to 300mm - Specialized Substrates 300mm x 300mm and up to 700mm diameter - Polysilicon Chunk Cleaning - Quartz Tubes - Crucible Filaments - Disk Drive Media and Heads - Bump Packaging - Electroless and Electroplating - UBM Under Bump Metallization - Wafer Processing - Etch - Solvent - Diffusion - Prediffusion - Oxide - Nitride - Resist - Photo resist - Biotech - DNA Arrays - Subdermal Sensors - PLC Programmable Logic Controllers - Quartz Tanks - Linear Transfer - Rotary Transfer - Chemical Dispense Systems - Waste Collection Systems - Water Heaters - Storage Cabinets - Carts

What are YOUR needs?

Final Clean, Prediffusion Clean, Oxide Etch, Nitride Etch, Resist Strip, Dewax, Preclean, Postlap, Etch, Tab Removal, Caustic Etch... to name a few of the process systems that our experienced and talented engineers and staff of personnel can design and build for you. You may choose from a wide variety of automated robotic transfer systems, various types of baths, custom built pass through storage cabinets, dryers, transfer carts, work stations, and deionized water heaters, plus different structural materials, in addition to the most state-of-the-art software applications.

Software

Touch Screen (Monochrome or Color)

PC Based Computerized Control

Programmable Logic Controller (PLC)

Storage Capacity of up to 50 Recipes

Factory Interface Protocols

Bath Life Monitoring

Automatic Bath Change

Multi-Process Megasonic

Ultrasonic (Stainless Steel)

Perflouroalkoxy Resin (Teflon®)

Polyvinylidene Fluoride (PVDF)

Automated Linear Transfer (ALT)
Active or Passive End Effector
Transfer speeds of less than one second
Automated Rotary Transfer (AT)
Arrayed Movement (Simultaneous movement of product through the system)

Why buy from SPEC?

Semiconductor Process Equipment Corporation (SPEC), designs and manufactures wafer and device-level wet process equipment for the semiconductor industry and equipment for other industries requiring high levels of processing cleanliness. Each system is custom designed and manufactured to fit the unique needs and requirements of our customers. Additionally, our systems are designed to meet the guidelines noted in NEC, NFPA, OSHA, SEMI, and ANSI specifications and standards.

SPEC is experienced in designing equipment that operates within a clean room environment. Overall impact to your clean room environment is minimized by incorporating laminar air flow, reduced exhaust consumption, and through the minimization of particulate generation into the initial design process.

Process compatibility with materials used in our construction is a high priority at SPEC. We choose the highest grade materials possible, to ensure that chemical interaction does not degrade your process.

All of our systems are manufactured in a facility located in Valencia, California. These facilities include metal fabrication equipment, and a full CNC machine shop, in addition to plastic fabrication equipment, including 5 by 10 foot CNC machining centers, a CNC mill, and numerous polypropylene welding tables and welders.

Final assembly and testing of all systems is completed using clean dry air and deionized water, in our Class 1000 clean room. After final testing, the systems are thoroughly cleaned with a mixture of isopropyl alcohol and deionized water and then triple packaged for protection, prior to shipment to our customers.